Vacuum clamping plates

Vacuum clamping plates

Vacuum clamping plates for semi-conductor wafers (“chucks”), miniature aerostatic bearings for nanometer positioning in wafer steppers, components for lenses and laser beam guidance systems - for the precision level required in this case, the ultra-precision machining by Kugler provides technology that enables exceptional economic solutions.

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Lothar KuglerLothar Kugler
Tel. +49 7553 9200-0Kugler GmbH

Heiligenberger Str. 100
88682 Salem, Germany

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